| 1. SENSOR | |
| Item | Description |
| Principle | Electric Inductor Type |
| Range | 160um |
| Stylus Radius | 5um |
| Stylus Material | Diamond |
| Contact Force | 4Mn(0.4gf) |
| Stylus Angle | 90° |
| GUIDE VERTICAL RADIUS SPECIFICATION | 45mm |
| 2. Main Unit | |
| Max. Drive Travel Length | 17.5mm/0.7inch |
| Error | <±10% |
| Result Variation | < 6% |
| Measuring Profile | Roughness, waviness, primitive profile |
| Parameters | Ra (0.005-16um), Rz (0.02-160um), Rq, Rt, Rp, Rv, R3z, R3y, RzJIS, Rsk, Rku, Rsm, Rmr |
| Filter | RC, PCRC, Gauss, ISO 13565 |
| Sampling Length (L) | 0.25mm, 0.8mm, 2.5mm, 8mm |
| Evaluation Length (L) | (1-5) I |
| Data Storage Capacity | 2MB + 2GB |
| Communication/Interface | USB2.0 |